Physical structure of lithium niobate thin films

Thin films of LiNbO have been RF sputter deposited on silicon and sapphire substrates. A number of analytical techniques have been used to determine the physical structure of these films. This analysis shows that the resulting films are stoichiometric LiNbO/sub 3/ and oriented polycrystalline in nature. It is now possible to consider applications which utilize the unique properties of these films.<
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