Study of novel Love mode surface acoustic wave filters

Novel Love mode filters based on ZnO and SiO/sub 2//90/spl deg/ rotated ST-cut quartz crystal structure were fabricated. A comprehensive study was carried out to show the capabilities of such filters. The periodicity of the fingers is 50 /spl mu/m and the thickness of the SiO/sub 2/ and ZnO layers ranges from 0.2 to 7.2 /spl mu/m. Electromechanical coupling coefficient, capacitance per unit wavelengths of finger pairs and temperature coefficient of frequency are studied in terms of thickness of the wave-guiding layers.