Monolithically integrated high-speed light source using 1.3-µm wavelength DFB-DC-PBH laser

The first monolithic high-speech light source, consisting of an InGaAsP/InP DFB laser, metal-insulator-semiconductor field-effect transistors, and a monitoring photodiode, has been fabricated. Small-signal modulation bandwidth up to 4 GHz was successfully achieved. The device design, fabrication procedures, and operating characteristics for the integrated light source are described.