Electrical characterization of megabit DRAMs. 11. Internal testing

For pt.I. see ibid., vol.8, no.3, p.36-43 (1991). Contactless tools for testing inside dynamic RAMs, including hot-spot detection, emission microscopy, scanning laser microscopy, and submicron electron beam testing, are described. Basic principles and experimental setups are described. The utility of the techniques is assessed.<
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