Semi-insulating silicon nitride (SinSiN) as a resistive field shield

A plasma-deposited semi-insulating silicon nitride (SinSiN) developed as a resistive sea passivation is discussed. Following a brief review of its properties, its use as a resistive sea is reviewed. It is shown that SinSiN can be used to improve the breakdown voltage of a high-voltage device by some 20 to 40 V by screening all surface charges. It is also shown that SinSiN provides device immunity to surface charges, thereby improving yield and reliability.<
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