Sputtered Pt/Co multilayers for magneto-optical recording

By sputtering Pt/Co multilayers with either Kr or Xe instead of Ar, a large magnetic coercivity of approximately 1000 Oe suitable for magnetooptical recording was achieved. Sputtering with a larger-mass gas reduced both the flux and the energy of backreflected gas neutrals, which can mix Pt and Co layers and compromise magnetic properties. Multilayer-related Pt-Co alloys with perpendicular magnetic anisotropy and coercivities of 1-3.5 kOe were made by sputtering them at high Ar pressures (20-50 mTorr).<
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