Coercivity control of RF magnetron sputtered CoCr films by external magnetic field

CoCr films were prepared on glass substrates with uniform magnetic fields applied perpendicular to the substrate surface. When the magnetic field was varied from 0 to 96 Oe, the perpendicular coercivity of 20 at.% CrCo films made at an Ar pressure of 1.5 mtorr increased from about 100 to 850 Oe. The c-axis dispersion slightly increased by about a degree. At a magnetic field of 96 Oe, a lower Ar pressure of 1 mtorr resulted in a higher coercivity of 1000 Oe. X-ray analysis revealed a correlation between the coercivity and the microstrain as well as lattice coherency.<
>