Controlling the induced anisotropy in soft magnetic films for high-frequency applications

Nanocrystalline soft magnetic Fe-Zr-N films were successfully deposited by dc magnetron reactive sputtering. The nitrogen content was controlled by varying the Ar/N/sub 2/ ratio and/or the substrate temperature. The films have saturation magnetization and induced uniaxial anisotropy values in the range 17-21 kG and 0-30 Oe, respectively. The origin of the induced anisotropy is discussed. The films can be used as magnetic cores for inductors at gigahertz frequencies.