Fabrication of magnetic dot arrays by ion beam induced chemical vapor deposition (IBICVD)

Cobalt dot arrays are fabricated by Ga/sup +/ ion beam induced chemical vapor deposition (IBICVD) with an objective to explore size limitations. Dots of about 100-150 nm in diameter are obtained as flat islands. Characterization by means of magnetic force microscopy (MFM) and Lorentz transmission electron microscopy (LTEM) show the deposited structures exhibiting ferromagnetic properties.