Thin-film piezoelectric DSA for HDD

A new dual-stage actuator (DSA) for positioning a magnetic head for high-density hard disk drives was proposed and developed. This DSA device is characterized by applying sputter-deposited thin-film lead-zirconate-titanate material (PZT), instead of the previously proposed bulk type actuator. The device performance was found to be outstanding with peak-to-peak head displacement of 1.2 /spl mu/m at an applied voltage of /spl plusmn/5 V, and suspension resonance frequency higher than 15 kHz, yielding a servo bandwidth of more than several kHz.