MEMS-based systems for DNA sequencing and forensics

We outline some of the most important scientific problems that were overcome in this multiyear project. These include (a) the high-yield microfabrication of zero-defect bonded glass plates at sizes greatly exceeding semiconductor fabrication, (b) the integration of electrodes, reservoirs, and high-pressure seals into these plates, (c) detector optimization for the required very high rate data acquisition and (d) microfluidics issues and optimizations related to channel geometry.