Interdigitated humidity sensors for a portable clinical microsystem

This paper presents and compares two capacitive humidity sensors with interdigitated electrodes for a portable clinical application. A polyimide-sensitive layer covers the first structures and the optimized ones include a benzocyclobutene-sensitive layer and a heating resistor. Humidity measurements results are presented, in particular sensors response time in absorption, which are very small (inferior to 500 ms). Next, mechanisms of absorption and adsorption in a polymer layer are described and the two structures are compared. Suitability of optimized sensors for our application is discussed: new structures allow us to increase sensitivity and decrease response time. When the structure is maintained at 40/spl deg/C by its heater, the response time is 200 ms and the total desorption time is 11 s.