XY-stage driving electron-beam mastering with nanometer-accuracy positioning for high-density optical disk

Toward the goal of achieving 40-100 Gbit/in/sup 2/ high-density optical recording, multilevel mark-edge recording combined with dual-track reproduction has been proposed under the name SCIPER/RPR (single-carrier independent pit-edge recording/radial-direction partial response). We have designed and developed an XY-stage driving electron beam (EB) mastering system to fabricate a high-density master disk. This time we applied the EB mastering system to the 40-Gbit/in/sup 2/ SCIPER/RPR format. Then, we evaluated the format for pit-edge positioning using an optical filtering technique.