New design for magnetic storage elements of micro power supplies

In the fast growth context of micro-electromechanical systems (MEMS) applications, an important improvement of power supplies "power-to-weight" ratio can be obtained through the integration of magnetic storage elements with their associated electronic environment. These components are usually used to transfer and store high energy densities with high magnetic flux. But up until now, integrated devices with these inductive elements were mainly limited by low inductance and current values. To make optimised new designs and achieve realisation of such inductive elements, we propose a new complete methodology, illustrated through a micro-machined square planar inductor. Indeed, after defining specifications (power, inductance value, frequency, geometrical dimensions), a mathematical method is used to define a first geometrical parameters set. To achieve it, several simulations are conducted with CAD tools dedicated to MEMS technology. Our method is based on a new specific last nano-imprint technology we have developed in our laboratory and adapted, in parallel, to our application.