Different discharge regimes in a microwave cavity coupling system used for the generation of moderate pressure H/sub 2/ and H/sub 2//CH/sub 4/ plasmas

Simulated two-dimensional distributions of absorbed power density in a moderate pressure H/sub 2/ plasma obtained using a microwave cavity coupling system are presented. In a first set of simulation, we analyze the change in the power density distribution when input power is increased at a constant pressure. Then, we investigate the evolution of this distribution when the average power density is increased by simultaneously increasing the input power and the pressure while keeping the plasma volume constant.