Metastable argon density evolution in a pulsed ICP discharge

A two-dimensional self-consistent plasma fluid model was developed to study the dynamics of a pulsed power inductively coupled argon discharge. The metastable Ar*(/sup 3/P/sub 0/ and /sup 3/P/sub 2/ levels) density evolution during a pulse is governed by volumetric reactions, giving rise to complex spatiotemporal behavior.