LiNbO3 PhC waveguide

In this work we successfully fabricated and measured PhCs patterned on a LiNbO3 APE waveguide. SIMS data indicate that after 5 hours exchange time a PE layer of 3µm can be obtained. The depth of holes was 2µm by applying a large milling current. We presented experimental characterization of the PhC waveguide and a well-defined PBG was observed from the transmission spectra. An extinction ratio was estimated to be approximately 15dB. Optical transmission results indicate that deep air holes can lead to a sharp band edge. This PhC waveguide is a good candidate for further development of an ultra-compact, low-voltage LiNbO3 modulator.