Technological investigation of LTCC-based Micro-Electro-Mechanical Systems (MEMS) to improve reliability and accuracy

The Low Temperature Co-fired Ceramics (LTCC) process is a promising technology for the production of innovative Micro-Electro-Mechanical Systems (MEMS). However, a deep understanding of this technology, in order to achieve a high production yield, accuracy and reliability, is required. Subject of this study is to investigate the shrinkage and material properties of differently structured LTCC substrates based on the material system GT951 as a function of various technological fabrication parameters. The intention behind is to control the behavior of the MEMS component precisely during the different steps of the manufacturing process.