Nanospectroscopy Imaging Techniques: Using NSOM and TERS for Semiconductor Materials Imaging

In this article, we introduce the theory and instrumentation that is relevant to nanospectroscopy imaging techniques, including near-field scanning optical microscope (NSOM) and tip-enhanced Raman scattering (TERS) imaging. We also demonstrate the NSOM and TERS imaging functions in emiconductor samples. Our findings support the view that NSOM and TERS imaging techniques can increase the space resolution and emphasize the surface information for the target surface layer. Thus, these techniques are applicable to the studies of materials with nanoscale patterns in the future.