FM/rate integrating MEMS gyroscope using independently controlled CW/CCW mode oscillations on a single resonator

This paper reports a frequency modulated (FM)/rate integrating MEMS gyroscope where superposed clockwise (CW) and counter clockwise (CCW) modes are independently controlled on a single resonator. A frequency and quality factor mismatch compensation method by adjusting the phases and amplitudes of driving signal is proposed and experimentally demonstrated. The mismatch compensation method proposed here could drastically reduce the both angular rate and angle error induced by interference between two oscillation modes. The scale factors were measured as high as about 0.73 having a quite small temperature dependency.