An Improved Line-Reflect-Reflect-Match Calibration With an Enhanced Load Model

An improved line-reflect-reflect-match calibration with an enhanced load model is proposed. Different from load models used by existing LRRM algorithms, the load model used in the proposed algorithm takes into account both the parasitic capacitance and inductance. Using the same calibration standards as the classical LRRM and the enhanced LRRM, the proposed algorithm can accurately determine the load parasitics from raw measurements. Measurement results from 0.5 GHz to 110 GHz on a commercial impedance standards substrate show that the proposed LRRM outperforms the classical LRRM and the enhanced LRRM, and gives multiline TRL quality on-wafer calibrations.