Electrode design of AlN Lamb wave resonators

The impact of electrode configurations, materials, thicknesses and interdigital transducer (IDT) duty factor (DF) on performance of aluminum nitride (AlN) Lamb wave resonators is analyzed and summarized for the first time in this study. By careful design and selection of the transducer and bottom electrodes, the effective electromechanical coupling coefficient (k
²
_eff
) of the AlN Lamb wave resonator can be boosted from ~2% to values close to 7%. The results reported in this paper lay the foundation for transducer designs of AlN Lamb wave resonators.