Simulation of MEMS energy harvesting generators based on Bennet's doubler

This paper presents considerations about the design and operation of electrostatic generators based on Bennet's doubler, when realized with microelectromechanics techniques. Electrical models taken from mechanical analogs are used to simulate the devices in operation, with the effects of the mechanical operations and interactions with electrical forces taken into account in the models. From the simulated results, guidelines for the design of the actual systems can be obtained.