Low loss hybrid micromachined filter

This paper describes the design of micro machined 2-layer structure bandpass filter design at 75–110GHz. A two-layer structure having substrate layer and circuit layer, has been designed and simulated with ground plane on the down wafer and solid substrate supporting the circuit is much stronger and much easier to be fabricated on silicon substrate compared with conventional 3-layer membrane structure. The microwave performances of the filter show less than 1dB insertion loss and enough stop band rejection for W band application.