Characterizations of silicon nanowires (SiNWs) embedded NEMS sensors and for potential biomedical applications

Various Nanoelectromechanical Systems (NEMS) sensors using piezoresistive silicon nanowires (SiNWs) as the sensing elements for pressure, strain and flow detection are reported. Measurement results reveal both excellent scalability and sensing stability for SiNWs based NEMS devices. Additionally, the new ultracompact pressure sensor with novel micro-grooved diaphragm structure is reported for low pressure range measurement, which leads to potential bio-medical applications.