Deposition of CuInSe/sub 2/ films by a two-stage process utilizing E-beam evaporation

The deposition technique involves first depositing Cu and In metallic layers onto a substrate using the electron-beam evaporation method and then selenizing these layers in an H/sub 2/Se atmosphere. High-quality CuInSe/sub 2/ films of chalcopyrite phase have been obtained by this technique, and the films have been characterized by scanning electron microscopy, X-ray diffraction, electron microprobe, and resistivity measurements. Solar cells have been fabricated using these CuInSe/sub 2/ films, and active-area conversion efficiency values approaching 11% have been demonstrated for these devices.<
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