Exploring the limits and practicality of Q-based temperature compensation for silicon resonators
Salvia, J.; Messana, M.; Ohline, M.; Hopcroft, M.A.; Melamud, R.; Chandorkar, S.; Lee, H.K.; Bahl, G.; Murmann, B.; Kenny, T.W.
Electron Devices Meeting, 2008. IEDM 2008. IEEE International
Volume , Issue , 15-17 Dec. 2008 Page(s):1 - 4
Digital Object Identifier   10.1109/IEDM.2008.4796783
Summary:We investigate using quality factor as a thermometer in embedded temperature compensation systems for micromechanical silicon resonator-based frequency references. Our compensated 1.3 MHz prototype oscillator, implemented on a single printed circuit board, achieves temperature stability of plusmn1 ppm from 0degC to 70degC after multipoint calibration or plusmn25 ppm after single point calibration. Drawbacks and limitations of the compensation schemes are discussed.

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