Magneto-optical garnet films made by reactive sputtering
Stadler, B.J.H.; Gopinath, A.
Magnetics, IEEE Transactions on
Volume 36, Issue 6, Nov 2000 Page(s):3957 - 3961
Digital Object Identifier 10.1109/20.914347
Summary:Reactive radio frequency (RF) sputtering was used to grow
cerium-doped yttrium iron garnet (YIG) films on magnesium oxide
substrates. Magnesium oxide has been proven to be a good buffer material
for semiconducting substrates. Reactive sputtering was not effective for
cerium doping because the cerium target reacted with the oxygen in the
sputtering gas. The films were amorphous as deposited. Stoichiometric
compositions yielded smooth, polycrystalline garnet films on annealing.
The effects of fluctuations in the yttrium-to-iron ratio were studied.
Separate iron and yttrium targets were cosputtered in order to tailor
the composition systematically along the iron-yttrium binary phase
diagram. Oxygen content was found to be important in the formation of
garnet and in the prevention of secondary phases. The garnet films had
strong in-plane magnetizations and small coercive fields, which have
promise for waveguide and switch devices, respectively
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