A new high performance phase shifter using BaxSr1-xTiO3 thin films
Acikel, B.; Taylor, T.R.; Hansen, P.J.; Speck, J.S.; York, R.A.
Microwave and Wireless Components Letters, IEEE
Volume 12, Issue 7, Jul 2002 Page(s):237 - 239
Digital Object Identifier 10.1109/LMWC.2002.801129
Summary:In this paper, a new device topology has been proposed to
implement parallel plate capacitors using
BaxSr1-xTiO3 (BST) thin films. The
device layout utilizes a single parallel capacitor and minimizes
conductor losses in the base electrode. The new design simplifies the
monolithic process and overcomes the problems associated with electrode
patterning. An X-band 180° phase shifter has been implemented using
the new device design. The circuit provided 240° phase shift with an
insertion loss of only 3 dB at 10 GHz at room temperature. We have shown
a figure of merit 93°/dB at 6.3 GHz and 87°/dB at 8.5 GHz. To
our knowledge, these are the best figure of merit results reported in
the literature for distributed phase shifters implemented using BST
films at room temperature
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