MEMS-based variable optical interference devices
Goossen, K.W.
Optical MEMS, 2000 IEEE/LEOS International Conference on
Volume , Issue , 2000 Page(s):17 - 18
Digital Object Identifier 10.1109/OMEMS.2000.879606
Summary:We discuss our so-called MARS (mechanical anti-reflection switch)
devices, in which the membranes in the first devices have the same
thickness and refractive index as an anti-reflection coating. By varying
the air gap between odd and even multiples of λ/4 the
reflectivity goes from high to near zero. This can be easily understood
since if the air gap is zero it is of anti-reflecting and if it is
λ/4 a high reflector mirror stack is formed, and since in any
optical stack the reflectivity at the center wavelength is independent
of additions of λ/2 to any layer. Six devices are described that
only require variations on the layer structure of this simple mechanical
structure, including changes in refractive index and thickness and
additional layers. These are the simple data modulator requiring only on
and off states, and the design methodology for trading insertion loss
for wavelength range, a linear response device for producing harmonic
signals, an attenuator requiring variable reflectivity that is
independent of wavelength, a multi-electrode wavelength power equalizer,
a gain slope compensator that has variable spectral tilt without
attenuation changes, and a display design for operation over the entire
visible spectrum
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