On the use of tin oxide for metal-dielectric mirrors with strongadhesion
Goossen, K.W.; Knox, W.H.
Lasers and Electro-Optics Society 1999 12th Annual Meeting. LEOS apos;99. IEEE
Volume 1, Issue , 1999 Page(s):171 - 172 vol.1
Digital Object Identifier 10.1109/LEOS.1999.813533
Summary:Many optical devices, but particularly vertical-cavity surface
emitting lasers (VCSEL's), require high reflectivity mirrors. These
mirrors are typically stacks of quarter-wavelength thick layers (as
measured in the material), of alternating high and low index layers,
placed on the device either by epitaxial techniques, or by dielectric
deposition techniques such as evaporation. For bottom emitters, the
thickness of these mirrors can be greatly reduced by capping the stack
with a low optical loss metal (the thickness of the last dielectric
layer would be adjusted for optical phase matching)
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