Advancements in complementary carbon nanotube field-effect transistors
Javey, A.; Qian Wang; Woong Kim; Hongjie Dai
Electron Devices Meeting, 2003. IEDM apos;03 Technical Digest. IEEE International
Volume , Issue , 8-10 Dec. 2003 Page(s): 31.2.1 - 31.2.4
Digital Object Identifier 10.1109/IEDM.2003.1269387
Summary:High performance p- and n-type single-walled carbon nanotube (SWNT) field-effect transistors (FETs) are obtained by using high and low work function metals, Pd and Al as source/drain (S/D) electrodes respectively. Ohmic contacts made to chemically intrinsic SWNTs, with no or small Schottky barriers (SB), afford high ON-state currents up to 20 μA per tube. The lack of significant Fermi-level pinning at the nanotube-metal interfaces allows for fine-tuning of the barrier heights for p-and n-channel conductions by changing the contact metals. The air-stable p- and n-FETs thus obtained can be used for complementary nanoelectronics, as demonstrated with the fabrication of an inverter. Other important issues regarding nanotube FETs including hysteresis, OFF-state leakage currents, choice of nanotube diameter, and threshold voltage control are discussed.
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