Surface- and bulk- micromachined two-dimensional scanner driven by angular vertical comb actuators
Piyawattanametha, W.; Patterson, P.R.; Hah, D.; Toshiyoshi, H.; Wu, M.C.
Microelectromechanical Systems, Journal of
Volume 14, Issue 6, Dec. 2005 Page(s): 1329 - 1338
Digital Object Identifier   10.1109/JMEMS.2005.859073
Summary:In this paper, we present the design, fabrication, and measurements of a two-dimensional (2-D) optical scanner with electrostatic angular vertical comb (AVC) actuators. The scanner is realized by combining a foundry-based surface-micromachining process (Multi-User MEMS Processes-MUMPs) with a three-mask deep-reactive ion-etching (DRIE) postfabrication process. The surface-micromachining provides versatile mechanical design and electrical interconnect while the bulk micromachining offers high-aspect ratio structures leading to flat mirrors and high-force, large-displacement actuators. The scanner achieves dc mechanical scanning ranges of ±6.2° (at 55 Vdc) and ±4.1° (at 50 Vdc) for the inner and outer gimbals, respectively. The resonant frequencies are 315 and 144 Hz for the inner and the outer axes, respectively. The 1-mm-diameter mirror has a radius of curvature of over 50 cm. [1454].

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