Gimbal-less MEMS two-axis optical scanner array with high fill-factor
Tsai, J.; Wu, M.C.
Microelectromechanical Systems, Journal of
Volume 14, Issue 6, Dec. 2005 Page(s): 1323 - 1328
Digital Object Identifier   10.1109/JMEMS.2005.859193
Summary:In this paper, we report on a MEMS-based two-axis optical scanner array with a high fill factor (>96%), large mechanical scan angles (±4.4° and ±3.4°), and high resonant frequencies (20.7 kHz). The devices are fabricated using SUMMiT-V, a five-layer surface-micromachining process. High fill factor, which is important for 1×N² wavelength-selective switches (WSSs), is achieved by employing crossbar torsion springs underneath the mirror, eliminating the need for gimbal structures. The proposed mirror structure can be readily extended to two-dimensional (2-D) array for adaptive optics applications. In addition to two-axis rotation, piston motion with a stroke of 0.8 μm is also achieved. [1496].

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