Addressing the needs of complex MEMS design
Clark, J.V.; Bindel, D.; Kao, W.; Zhu, E.; Kuo, A.; Zhou, N.; Nie, J.; Demmel, J.; Bai, Z.; Govindjee, S.; Pister, K.S.J.; Gu, M.; Agogino, A.
Micro Electro Mechanical Systems, 2002. The Fifteenth IEEE International Conference on
Volume , Issue , 2002 Page(s):204 - 209
Digital Object Identifier   10.1109/MEMSYS.2002.984240
Summary:In this paper, we report several advances in the Sugar2.0 MEMS system simulation package, including reduced-order modeling techniques, simple hierarchical description of complex structures, synthesis tools, a variety of models, and a web-based interface. Examples include the modeling of a torsional micromirror with lateral actuators compared to experiment, and the prototyping of a microrobot

» View citation and abstract

Log in by entering your IEEE Web Account Username and Password.

IEEE Communications Society members: If you subscribe to the IEEE Electronic Periodicals Package or IEEE Electronic Periodicals Package Plus, you must access your subscription at www.comsoc.org.

Check with your librarian, information professional, or system manager to determine if you need to log in. Please complete the online Technical Support Form if you need assistance.

Select the Purchase History link to access the document. You will have 5 Days after purchase to access the Full Text PDF. Please complete the online Technical Support Form if you need assistance.

• Search and access Abstract records free of charge
• Register for table of contents alerts
• Purchase Full Text PDF documents

» Learn more about subscription options or how to become an IEEE Member.