In situ growth of MgB₂ thin films by hybrid physical-chemical vapor deposition
Xi, X.X.; Zeng, X.H.; Pogrebnyakov, A.V.; Xu, S.Y.; Qi Li; Yu Zhong; Brubaker, C.O.; Zi-Kui Liu; Lysczek, E.M.; Redwing, J.M.; Lettieri, J.; Schlom, D.G.; Tian, W.; Pan, X.Q.
Applied Superconductivity, IEEE Transactions on
Volume 13, Issue 2, June 2003 Page(s): 3233 - 3237
Digital Object Identifier   10.1109/TASC.2003.812209
Summary:We have carried out thermodynamics studies of the Mg-B system with the calculation of phase diagrams (CALPHAD) modeling technique and found that the superconductor MgB₂ phase is thermodynamically stable only under fairly high Mg pressures at elevated temperatures. This has lead us to the investigation of chemical vapor deposition in which the pressure during the film deposition can be high. Although the initial effort on metal-organic chemical vapor deposition (MOCVD) was not successful due to carbon contamination, a unique hybrid physical-chemical vapor deposition (HPCVD) technique has successfully produced high quality in situ MgB₂ films. The epitaxially-grown MgB₂ films show high transition temperature and low resistivity comparable to the best bulk samples, and their surfaces are smooth. In this paper, the details of the technique and the results of the HPCVD films are presented.

» View citation and abstract

Log in by entering your IEEE Web Account Username and Password.

IEEE Communications Society members: If you subscribe to the IEEE Electronic Periodicals Package or IEEE Electronic Periodicals Package Plus, you must access your subscription at www.comsoc.org.

Check with your librarian, information professional, or system manager to determine if you need to log in. Please complete the online Technical Support Form if you need assistance.

Select the Purchase History link to access the document. You will have 5 Days after purchase to access the Full Text PDF. Please complete the online Technical Support Form if you need assistance.

• Search and access Abstract records free of charge
• Register for table of contents alerts
• Purchase Full Text PDF documents

» Learn more about subscription options or how to become an IEEE Member.