High-power polarization-engineered GaN/AlGaN/GaN HEMTs without surface passivation
Shen, L.; Coffie, R.; Buttari, D.; Heikman, S.; Chakraborty, A.; Chini, A.; Keller, S.; DenBaars, S.P.; Mishra, U.K.
Electron Device Letters, IEEE
Volume 25, Issue 1, Jan. 2004 Page(s): 7 - 9
Digital Object Identifier 10.1109/LED.2003.821673
Summary:In this paper, a high-power GaN/AlGaN/GaN high electron mobility transistor (HEMT) has been demonstrated. A thick cap layer has been used to screen surface states and reduce dispersion. A deep gate recess was used to achieve the desired transconductance. A thin SiO2 layer was deposited on the drain side of the gate recess in order to reduce gate leakage current and improve breakdown voltage. No surface passivation layer was used. A breakdown voltage of 90 V was achieved. A record output power density of 12 W/mm with an associated power-added efficiency (PAE) of 40.5% was measured at 10 GHz. These results demonstrate the potential of the technique as a controllable and repeatable solution to decrease dispersion and produce power from GaN-based HEMTs without surface passivation.
View citation and abstract |