From Micro to Nano: MEMS as an interface to the nano world
Boser, B.E.
Computer-Aided Design, 2006. ICCAD apos;06. IEEE/ACM International Conference on
Volume , Issue , 5-9 Nov. 2006 Page(s):824 - 825
Digital Object Identifier   10.1109/ICCAD.2006.320127
Summary:Leveraging conventional microsystems technology, MEMS has become the technology of choice for a wide range of applications including inertial sensors for automotive, games, and consumer applications, projection displays or inkjet print heads. In support of recent efforts to shrink dimensions to the nanoscale, MEMS has established itself as a perfect technology for interaction with the nanoworld. We will describe initial results using MEMS to manipulate single molecules for medical diagnostics. This technology has the potential to turn complex laboratory procedures into procedures that are as simple as taking the temperature

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