Materials issues of SAW sensors for high-temperature applications
Mrosk, J.W.; Berger, L.; Ettl, C.; Fecht, H.-J.; Fischerauer, G.; Dommann, A.
Industrial Electronics, IEEE Transactions on
Volume 48, Issue 2, Apr 2001 Page(s):258 - 264
Digital Object Identifier 10.1109/41.915403
Summary:The technology of surface acoustic wave (SAW) devices allows the
integration of signal processing and sensor functions within one
product. In the past, SAW sensors have been operated at room temperature
or 100°C-200°C at most, material-related problems become obvious
if one attempts to increase this operating temperature to a value as
high as 1000°C. First experimental results are presented based on a
variation of the metallization and the use of diffusion barriers. It is
expected that the use of these specially tailored materials with
particular functional properties will lend to a considerable improvement
of the lifetime and reliability of SAW sensors and the development of
devices resistant to high temperatures as well as high pressures and
chemically aggressive environments. The high-temperature characteristics
of such novel devices are investigated by finite-element simulation and
by experimental deformation analysis. Which assembly, interconnection,
and packaging techniques are applicable at 1000°C are also discussed
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