Kinetic two-dimensional modeling of inductively coupled plasmasbased on a hybrid kinetic approach
Kortshagen, U.; Heil, B.G.
Plasma Science, IEEE Transactions on
Volume 27, Issue 5, Oct 1999 Page(s):1297 - 1309
Digital Object Identifier 10.1109/27.799806
Summary:In this paper, we present a two-dimensional (2-D) kinetic model
for low-pressure inductively coupled discharges. The kinetic treatment
of the plasma electrons is based on a hybrid kinetic scheme in which the
range of electron energies is divided into two subdomains. In the low
energy range the electron distribution function is determined from the
traditional nonlocal approximation. In the high energy part the complete
spatially dependent Boltzmann equation is solved. The scheme provides
computational efficiency and enables inclusion of electron-electron
collisions which are important in low-pressure high-density plasmas. The
self-consistent scheme is complemented by a 2-D fluid model for the ions
and the solution of the complex wave equation for the RF electric field.
Results of this model are compared to experimental results. Good
agreement in terms of plasma density and potential profiles is observed.
In particular, the model is capable of reproducing the transition from
on-axis to off-axis peaked density profiles as observed in experiments
which underlines the significant improvements compared to models purely
based on the traditional nonlocal approximation
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