Two-dimensional mapping of electron distribution functions in lowpressure ICP
Heil, B.; Kortshagen, U.
Plasma Science, IEEE Transactions on
Volume 27, Issue 1, Feb 1999 Page(s):56 - 57
Digital Object Identifier   10.1109/27.763032
Summary:Two-dimensionally resolved Langmuir probe measurements of electron distribution functions (EDF) have been performed in a low pressure inductively coupled plasma. The measurements confirm nonlocal behavior of the EDF at low pressures while deviations from the nonlocality of the EDF are observed at higher pressures. The experimental results are discussed in terms of the energy relaxation length of the electrons

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