A low-voltage actuated micromachined microwave switch using torsionsprings and leverage
Dooyoung Hah; Songcheol Hong
Microwave Theory and Techniques, IEEE Transactions on
Volume 48, Issue 12, Dec 2000 Page(s):2540 - 2545
Digital Object Identifier 10.1109/22.899010
Summary:In this paper, a push-pull type microwave switch is proposed,
which utilizes torsion springs and leverage for low-voltage operation.
The switching operation up to 4 GHz is demonstrated. The actuation
voltage is ~5 V. The insertion loss of ~1 dB and the isolation as high
as ~40 dB at 1 GHz are achieved by the push-pull operation
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