Frequency-selective MEMS for miniaturized low-power communicationdevices
Nguyen, C.T.-C.
Microwave Theory and Techniques, IEEE Transactions on
Volume 47, Issue 8, Aug 1999 Page(s):1486 - 1503
Digital Object Identifier 10.1109/22.780400
Summary:With Q's in the tens to hundreds of thousands, micromachined
vibrating resonators are proposed as integrated circuit-compatible tanks
for use in the low phase-noise oscillators and highly selective filters
of communications subsystems. To date, LF oscillators have been fully
integrated using merged CMOS/microstructure technologies, and bandpass
filters consisting of spring-coupled micromechanical resonators have
been demonstrated in a frequency range from HF to VHF. In particular,
two-resonator micromechanical bandpass filters have been demonstrated
with frequencies up to 35 MHz, percent bandwidths on the order of 0.2%,
and insertion losses less than 2 dB. Higher order three-resonator
filters with frequencies near 455 kHz have also been achieved, with
equally impressive insertion losses for 0.09% bandwidths, and with more
than 64 dB of passband rejection. Additionally, free-beam single-pole
resonators have recently been realized with frequencies up to 92 MHz and
Q's around 8000. Evidence suggests that the ultimate frequency range of
this high-Q tank technology depends upon material limitations, as well
as design constraints, in particular, to the degree of electromechanical
coupling achievable in microscale resonators
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