Third-order intermodulation distortion in capacitively-driven VHF micromechanical resonators
Yu-Wei Lin; Sheng-Shian Li; Zeying Ren; Nguyen, C.T.-C.
Ultrasonics Symposium, 2005 IEEE
Volume 3, Issue , 18-21 Sept. 2005 Page(s): 1592 - 1595
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