Electrostatic combdrive-actuated micromirrors for laser-beamscanning and positioning
Meng-Hsiung Kiang; Solgaard, O.; Lau, K.Y.; Muller, R.S.
Microelectromechanical Systems, Journal of
Volume 7, Issue 1, Mar 1998 Page(s):27 - 37
Digital Object Identifier 10.1109/84.661381
Summary:We describe the design and fabrication of surface-micromachined
resonant microscanners that have large scan angles and fast scan speeds.
These scanning micromirrors, which are hundreds of micrometers on a
side, are driven by electrostatic-comb actuators and have resonant
frequencies in the kilohertz range. Fabricated with two or three
structural layers of polysilicon, the scanners are compact, extremely
light in weight, and potentially very low in cost. Their power
consumption is also minimal because the capacitive motors draw very low
currents. High-precision positioning (0.01° dynamically and
0.038° statically) over a large angular range (up to 28° optical
angle) makes the micromirrors suitable for a variety of optical
applications such as laser scanners and printers, displays, holographic
data storage, and fiber-optic switches. We have demonstrated
microscanners of this type in bar-code readers, which are important
devices with a growing number of applications in many industries
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