Modeling and optimal design of piezoelectric cantilevermicroactuators
DeVoe, D.L.; Pisano, A.P.
Microelectromechanical Systems, Journal of
Volume 6, Issue 3, Sep 1997 Page(s):266 - 270
Digital Object Identifier   10.1109/84.623116
Summary:A novel model is described for predicting the static behavior of a piezoelectric cantilever actuator with an arbitrary configuration of elastic and piezoelectric layers. The model is compared to deflection measurements obtained from 500-μm-long ZnO cantilever actuators fabricated by surface micromachining. Modeled and experimental results demonstrate the utility of the model for optimizing device design. A discussion of design considerations and optimization of device performance is presented

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