Cylindrical plastic lens array fabricated by a micro intrusionprocess
Pan, L.-W.; Lin, L.; Ni, J.
Micro Electro Mechanical Systems, 1999. MEMS apos;99. Twelfth IEEE International Conference on
Volume , Issue , 17-21 Jan 1999 Page(s):217 - 221
Digital Object Identifier 10.1109/MEMSYS.1999.746815
Summary:A cylindrical plastic lens array fabricated by a newly developed
micro intrusion process is demonstrated and characterized. A 500 μm
thick PC (polycarbonate) film is used as the raw material and hot
embossed with nickel mold inserts that are made by a single-layer LIGA
process. High-aspect-ratio circular holes of 80 μm in diameter and
200 μm in depth are designed to form the plastic cylindrical lens.
The plastic material is intruded into the circular holes and stopped at
desired distance by adjusting the embossing load, temperature and time.
The optical properties of these microlenses have been characterized by
measuring their focal lengths. The average radius of curvature is 56.1
μm with a standard deviation of 0.46 μm and the average height is
190.6 μm with a standard deviation of 4.9 μm. The focusing
capability of the lens is demonstrated by comparing the image of laser
light with and without using the lens. When the projection screen is
placed 200 μm away from the lens, the FWHM for the lens is 110 μm
while the FWHM of the optical fiber is 300 μm
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