High Resolution Shadow Mask Patterning In Deep Holes And Its Application To An Electrical Wafer Feed-through
Burger, G.J.; Smulders, E.J.T.; Berenschot, J.W.; Lammerink, T.S.J.; Fluitman, J.H.J.; Imai, S.
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers apos;95. The 8th International Conference on
Volume 1, Issue , 25-29 Jun 1995 Page(s):573 - 576
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