Application of MEMS technology in automotive sensors and actuators
Eddy, D.S.; Sparks, D.R.
Proceedings of the IEEE
Volume 86, Issue 8, Aug 1998 Page(s):1747 - 1755
Digital Object Identifier 10.1109/5.704280
Summary:Sensors and actuators are the critical system components that
collect and act on information in the analog environment and link it to
the world of digital electronics. The functional groups of sensors,
software, controller hardware, and actuators from the backbone of
present and future automotive systems. Unit volumes for sensors and
actuators in the automotive industry are measured in millions per year
and at a unit cost of a few dollars. The design of sensors and actuators
has increasingly made use of microelectromechanical systems (MEMS)
technology. This technology is well suited to producing a class of
micromachined sensors and actuators that combines signal processing and
communications on a single silicon chip or contained within the same
package. This paper contains a discussion of the issues in producing
MEMS sensors and actuators from the concept selection stage to the
manufacturing platform. Examples of commercial and emerging automotive
sensors and actuators are given, which illustrate the various aspects of
device development. Future trends in MEMS technology as applied to
automotive components are also discussed
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