GaAs MQW modulators integrated with silicon CMOS
Goossen, K.W.; Walker, J.A.; Dapos;Asaro, L.A.; Hui, S.P.; Tseng, B.; Leibenguth, R.; Kossives, D.; Bacon, D.D.; Dahringer, D.; Chirovsky, L.M.F.; Lentine, A.L.; Miller, D.A.B.
Photonics Technology Letters, IEEE
Volume 7, Issue 4, Apr 1995 Page(s):360 - 362
Digital Object Identifier   10.1109/68.376802
Summary:We demonstrate integration of GaAs-AlGaAs multiple quantum well modulators to silicon CMOS circuitry via flip-chip solder-bonding followed by substrate removal. We obtain 95% device yield for 32×32 arrays of devices with 15 micron solder pads. We show operation of a simple circuit composed of a modulator and a CMOS transistor

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